Fabrication Engineering at the Micro- and Nanoscale - Brossura

Campbell, Stephen A.

Brossura

ISBN 10: 0199861226 ISBN 13: 9780199861224

Casa editrice: OUP USA, 2012

Riassunto

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Su questo libro

Recensione:

This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques. (Xian-An Cao, West Virginia University)

I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material. (Trevor Thornton, Arizona State University)

L'autore:

Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.

Su questa edizione

• Editore: OUP USA
• Data di pubblicazione: 2012
• ISBN 10: 0199861226
• ISBN 13: 9780199861224
• Rilegatura: Copertina flessibile
• Numero edizione: 4
• Numero di pagine: 688