Handbook of Cleaning in Semiconductor Manufacturing: Fundamentals and Applications

Valutazione media 0
( su 0 valutazioni fornite da Goodreads )
 
9780470625958: Handbook of Cleaning in Semiconductor Manufacturing: Fundamentals and Applications
Vedi tutte le copie di questo ISBN:
 
 

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing.

From the Reviews...

"This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment."
Randy Wallace, Department Head, Discovery Park Library, University of North Texas

Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

Recensione:

 
This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate–level enrollment.  

––Randy Wallace, Department Head, Discovery Park Library, University of North Texas

L'autore:

Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. Currently, Karen works with start-up cleaning companies to develop their technology for acquisition. Prior to forming a consulting company, Karen was employed at Novellus Systems, AMD, and Cypress Semiconductor. She has published more than 30 technical publications, has been awarded seven patents, and is co-editor of Handbook of Silicon Wafer Cleaning Technology.

Richard F. Reidy (Ph.D., Penn State) is interim Chair and associate professor of Material Science and Engineering at the University of North Texas. He has conducted research in interconnect processing and characterization with over 60 technical publications and three patents. He is a member of the International Technology Roadmap for Semiconductors.

Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.

I migliori risultati di ricerca su AbeBooks

1.

Karen A. Reinhardt (Editor), Richard F. Reidy (Editor)
Editore: Wiley-Scrivener (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
Ergodebooks
(RICHMOND, TX, U.S.A.)
Valutazione libreria
[?]

Descrizione libro Wiley-Scrivener, 2011. Hardcover. Condizione: New. 1. Codice articolo DADAX0470625953

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 146,16
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 3,40
In U.S.A.
Destinazione, tempi e costi

2.

Karen A. Reinhardt; Richard F. Reidy
Editore: Wiley-Scrivener (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
Irish Booksellers
(Portland, ME, U.S.A.)
Valutazione libreria
[?]

Descrizione libro Wiley-Scrivener, 2011. Condizione: New. book. Codice articolo M0470625953

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 176,60
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 2,78
In U.S.A.
Destinazione, tempi e costi

3.

Karen A. Reinhardt; Richard F. Reidy
Editore: John Wiley and Sons Ltd, United Kingdom (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
The Book Depository
(London, Regno Unito)
Valutazione libreria
[?]

Descrizione libro John Wiley and Sons Ltd, United Kingdom, 2011. Hardback. Condizione: New. Language: English. Brand new Book. This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews. "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace, Department Head, Discovery Park Library, University of North Texas. Codice articolo AAH9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 211,75
Convertire valuta

Aggiungere al carrello

Spese di spedizione: GRATIS
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

4.

Karen A. Reinhardt; Richard F. Reidy
Editore: John Wiley and Sons Ltd, United Kingdom (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
Book Depository International
(London, Regno Unito)
Valutazione libreria
[?]

Descrizione libro John Wiley and Sons Ltd, United Kingdom, 2011. Hardback. Condizione: New. Language: English. Brand new Book. This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews. "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace, Department Head, Discovery Park Library, University of North Texas. Codice articolo AAH9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 211,77
Convertire valuta

Aggiungere al carrello

Spese di spedizione: GRATIS
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

5.

Reinhardt
Editore: John Wiley and#38; Sons (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Quantità: 1
Da
Books2Anywhere
(Fairford, GLOS, Regno Unito)
Valutazione libreria
[?]

Descrizione libro John Wiley and#38; Sons, 2011. HRD. Condizione: New. New Book. Shipped from UK in 4 to 14 days. Established seller since 2000. Codice articolo FW-9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 203,41
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 10,02
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

6.

Karen A. Reinhardt (editor), Richard F. Reidy (editor)
Editore: Wiley 2010-12-20, Hoboken, N.J. (2010)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 10
Da
Blackwell's
(Oxford, OX, Regno Unito)
Valutazione libreria
[?]

Descrizione libro Wiley 2010-12-20, Hoboken, N.J., 2010. hardback. Condizione: New. Codice articolo 9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 215,17
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 8,35
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

7.

Reinhardt
Editore: John Wiley and#38; Sons (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Quantità: > 20
Print on Demand
Da
Pbshop
(Wood Dale, IL, U.S.A.)
Valutazione libreria
[?]

Descrizione libro John Wiley and#38; Sons, 2011. HRD. Condizione: New. New Book. Shipped from US within 10 to 14 business days. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000. Codice articolo IQ-9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 230,98
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 3,40
In U.S.A.
Destinazione, tempi e costi

8.

Karen A. Reinhardt; Richard F. Reidy
Editore: John Wiley and Sons Ltd, United Kingdom (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 10
Da
Book Depository hard to find
(London, Regno Unito)
Valutazione libreria
[?]

Descrizione libro John Wiley and Sons Ltd, United Kingdom, 2011. Hardback. Condizione: New. Language: English. Brand new Book. This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. From the Reviews. "This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment." Randy Wallace, Department Head, Discovery Park Library, University of North Texas. Codice articolo LIE9780470625958

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 291,68
Convertire valuta

Aggiungere al carrello

Spese di spedizione: GRATIS
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

9.

Karen A. Reinhardt and Richard F. Reidy
Editore: Wiley-Scrivener (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
Books Express
(Portsmouth, NH, U.S.A.)
Valutazione libreria
[?]

Descrizione libro Wiley-Scrivener, 2011. Hardcover. Condizione: New. 1. Ships with Tracking Number! INTERNATIONAL WORLDWIDE Shipping available. Buy with confidence, excellent customer service!. Codice articolo 0470625953n

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 316,71
Convertire valuta

Aggiungere al carrello

Spese di spedizione: GRATIS
In U.S.A.
Destinazione, tempi e costi

10.

Reinhardt, Karen
Editore: Wiley-Scrivener (2011)
ISBN 10: 0470625953 ISBN 13: 9780470625958
Nuovo Rilegato Quantità: 1
Da
Revaluation Books
(Exeter, Regno Unito)
Valutazione libreria
[?]

Descrizione libro Wiley-Scrivener, 2011. Hardcover. Condizione: Brand New. 1st edition. 590 pages. 10.25x7.00x1.25 inches. In Stock. Codice articolo __0470625953

Informazioni sul venditore | Contattare il venditore

Compra nuovo
EUR 337,31
Convertire valuta

Aggiungere al carrello

Spese di spedizione: EUR 8,35
Da: Regno Unito a: U.S.A.
Destinazione, tempi e costi

Vedi altre copie di questo libro

Vedi tutti i risultati per questo libro