A User's Guide to Vacuum Technology - Rilegato

O'Hanlon, John F.

Rilegato

ISBN 10: 0471270520 ISBN 13: 9780471270522

Casa editrice: Wiley-Interscience, 2003

Riassunto

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

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Recensione

"...a fundamental understanding of modern vacuum technology and a practical user's perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user."
IEEE Electrical Insulation Magazine

L'autore

John F. O’Hanlon, PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

Dettagli dell?edizione

• Editore: Wiley-Interscience
• Data di pubblicazione: 2003
• ISBN 10: 0471270520
• ISBN 13: 9780471270522
• Rilegatura: Copertina rigida
• Lingua: Inglese
• Numero edizione: 3
• Numero di pagine: 550