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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997: 160 - Rilegato
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Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.
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Contenuti
Preface. Glossary. Nanoscanning (9 papers). Electron beam methods (9 papers). Optical methods (8 papers). Mapping (10 papers). X-ray methods (4 papers). Other and combined methods (8 papers). Image processing. Standardization. Si and SiGe mixed crystals (15 papers). SiC (3 papers). GaN (6 papers). Other III-V compounds (12 papers). II-VI compounds, phosphors, oxides and alternative substrates (4 papers). Processing and defects (3 papers). Defect recognition in devices and degradation (11 papers). Author and subject indices.
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- EditoreCRC Press
- Data di pubblicazione1998
- ISBN 10 0750305002
- ISBN 13 9780750305006
- RilegaturaCopertina rigida
- LinguaInglese
- Numero edizione1
- Numero di pagine524
- Contatto del produttorenon disponibile
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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) Held in Templin, Germany, 7-10 September 1997 [Institute of Physics Conference Series No. 160]
Editore:
Institute of Physics Publishing, Bristol / Philadelphia., 1998
ISBN 10: 0750305002
ISBN 13: 9780750305006
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Hardcover. Condizione: Very Good. 8vo, hardcover. No dj. Vg condition. Ex-lib copy w/ blacked-out stamping on endpapers & text-block edge; contents bright & clean, binding tight. xx, 524 p., illus. Codice articolo 1080501.07
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Defect Recognition and Image Processing in Semiconductors : Proceedings of the Seventh Conference on Defect Recognition and Image Processing, Berlin, September 1997 (Conference Series., No. 160),
Editore:
Institute of Physics Publishing, 1998,, 1998
ISBN 10: 0750305002
ISBN 13: 9780750305006
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Doneker, J: Defect Recognition and Image Processing in Semic
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Gebunden. Condizione: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Doneker, J.Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This . Codice articolo 594940535
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Defect Recognition and Image Processing in Semiconductors 1997 : Proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (Drip Vii) Held in Templin, Germany, 7-10
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