Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography - Brossura
Sinossi
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.
