Micro and Nano Fabrication: Tools and Processes - Brossura

Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg

 
9783662508268: Micro and Nano Fabrication: Tools and Processes
Brossura
ISBN 10: 3662508265 ISBN 13: 9783662508268
Casa editrice: Springer Verlag, 2016

Sinossi

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

Informazioni sull?autore

Hans Gatzen received a PhD equivalent in Mechanical Engineering from the RWTH Aachen in Aachen, Germany, and held various positions in the computer peripherals industry in Germany and the U.S. from 1973 to 1992. In 1992, he founded the Institute for Microtechnology (imt) at the Hanover University in Hanover, Germany (now Leibniz Universität Hannover) and was its director until his retirement in 2010. He is a Fellow of the American Society of Mechanical Engineers (ASME) and a member of Acatech (National Academy of Science and Engineering).

Volker Saile received a PhD in Physics from the Ludwigs-Maximilians-Universitaet München (LMU), and was later employed as a Staff Scientist at the Deutsches Elektronen-Synchrotron DESY in Hamburg, Germany, until 1989. From 1989 to 1998, he served as the Director of the J. Bennett Johnston, Sr., Center for Advanced Microstructures and Devices (CAMD), Baton Rouge, Louisana, USA. Since 1998, he is Professor of Microstructure Technology at the Karlsruhe Institute of Technology (KIT). Currently, he serves as Head of the KIT Division 5, Physics and Mathematics.

Juerg Leuthold is the head of the Institute of Electromagnetic Fields (IEF) at ETH Zurich, Switzerland. His research interests are in the field of nano-photonics, plasmonics, integrated optics and optical communications. From 2004 to 2013 he was a full Professor at the Karlsruhe Institute of Technology (KIT) in Germany and from 1999 to 2004 he was affiliated with Bell Labs,

Lucent Technologies.

Dalla quarta di copertina

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.

Editore
Springer Verlag
Data di pubblicazione
2016
Lingua
Inglese
ISBN 10 
3662508265
ISBN 13 
9783662508268
Rilegatura
Copertina flessibile
Numero di pagine
548
Contatto del produttore
Elevation
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Friedrich-Karl-Str. 9
Hamburg
22391
Germania

Altre edizioni note dello stesso titolo

9783662443941: Micro and Nano Fabrication: Tools and Processes

Edizione in evidenza

ISBN 10:  3662443945 ISBN 13:  9783662443941
Casa editrice: Springer, 2015
Rilegato