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Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell's equations using the volume integral method (VIM) - Brossura
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Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method.
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He is a lecturer at Haramaya University. He received his B.Sc. degree in Mathematics with distinction from Dilla University. He studied his 1st M.Sc. degree in Mathematics at Norwegian University of Science and Technology (Norway) and his 2nd M.Sc. degree in Industrial and Applied Mathematics at Eindhoven University of Technology (The Netherlands).
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
Editore:
LAP LAMBERT Academic Publishing Okt 2011, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Da: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germania
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Taschenbuch. Condizione: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. 104 pp. Englisch. Codice articolo 9783846510124
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Preconditioning Dense Complex Linear Systems from a VIM Discretization : Discretizing Maxwell's equations using the volume integral method (VIM)
Editore:
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Taschenbuch
Da: AHA-BUCH GmbH, Einbeck, Germania
Valutazione del venditore 5 su 5 stelle
Taschenbuch. Condizione: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. Codice articolo 9783846510124
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
Editore:
LAP LAMBERT Academic Publishing Okt 2011, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
Nuovo
Taschenbuch
Da: buchversandmimpf2000, Emtmannsberg, BAYE, Germania
Valutazione del venditore 5 su 5 stelle
Taschenbuch. Condizione: Neu. Neuware -Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method.Books on Demand GmbH, Überseering 33, 22297 Hamburg 104 pp. Englisch. Codice articolo 9783846510124
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
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Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Da: Books Puddle, New York, NY, U.S.A.
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Condizione: New. pp. 104. Codice articolo 2698285053
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
Editore:
Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Da: Biblios, Frankfurt am main, HESSE, Germania
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Condizione: New. PRINT ON DEMAND pp. 104. Codice articolo 1898285047
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Preconditioning Dense Complex Linear Systems from a VIM Discretization
Editore:
Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Da: Majestic Books, Hounslow, Regno Unito
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Condizione: New. Print on Demand pp. 104 2:B&W 6 x 9 in or 229 x 152 mm Perfect Bound on Creme w/Gloss Lam. Codice articolo 95160866
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Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell*s equations using the volume integral method (VIM)
Editore:
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
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Paperback. Condizione: Like New. Like New. book. Codice articolo ERICA75838465101226
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