Foto dell'editore

Chemical-Mechanical Planarization of Semiconductor Materials

M. R. Oliver

1 valutazioni da Goodreads
ISBN 10: 3540431810 / ISBN 13: 9783540431817
Editore: Springer-Verlag Gmbh Jan 2004, 2004
Nuovi Condizione: Neu
Da Rhein-Team Lörrach Ivano Narducci e.K. (Lörrach, Germania)

Libreria AbeBooks dal 11 gennaio 2012

Quantità: 1
Compra nuovo
Prezzo consigliato: 349.00
Prezzo: EUR 269,64 Convertire valuta
Spedizione: EUR 12,00 Da: Germania a: U.S.A. Destinazione, tempi e costi
Aggiungere al carrello

Riguardo questo articolo

Neuware - This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. There are detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed. 425 pp. Deutsch. Codice inventario libreria 9783540431817

Fare una domanda alla libreria

Dati bibliografici

Titolo: Chemical-Mechanical Planarization of ...

Casa editrice: Springer-Verlag Gmbh Jan 2004

Data di pubblicazione: 2004

Legatura: Buch

Condizione libro:Neu

Descrizione articolo

Riassunto:

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

From the Back Cover:

This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. There are detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.

Descrizione libreria

Visita la pagina della libreria

Condizioni di vendita:

Allgemeine Geschäftsbedingungen (abebooks.de)

Rhein-Team Lörrach, Inhaber Ivano Narducci e.K., Mühlestr. 1
D-79539 Lörrach, nachfolgend als Verkäufer bezeichnet.

§ 1 Allgemeines, Begriffsbestimmungen

(1) Der Verkäufer bietet unter dem Nutzernamen rhein-team unter der Plattform abebooks.de insbesondere Bücher an. Die folgenden Allgemeinen Geschäftsbedingungen (AGB) gelten für die Geschäftsbeziehung zwischen dem Verkäufer und dem Kunden in ihrer zum Zeitpunkt der Bestellung gültigen Fassung. Ferne...

Ulteriori informazioni
Condizioni di spedizione:

Die Ware wird innerhalb von 1-3 Tagen nach Bestelleingang verschickt. Bitte entnehmen Sie den voraussichtlichen Liefertermin Ihrer Bestellbestätigung. Die Versandkostenpauschalen basieren auf Durchschnittswerten für 1 kg schwere Bücher. Über abweichende Kosten (z.B. wegen eines sehr schweren Buches) werden Sie gegebenenfalls vom Verkäufer informiert.


Informazioni dettagliate sul venditore

Tutti i libri della libreria

Metodi di pagamento
accettati dalla libreria

Visa Mastercard American Express Carte Bleue

Assegno PayPal