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Handbook of Silicon Wafer Cleaning Technology, 2nd Edition, Second Edition (Materials Science and Process Technology)

ISBN 10: 0815515545 / ISBN 13: 9780815515548
Editore: William Andrew, 2008
Usato Condizione: Used
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This Book is in Good Condition. Clean Copy With Light Amount of Wear. 100% Guaranteed. Summary: Part 1: Introduction and Overview Overview and Evolution of Silicon Wafer Cleaning Technology Overview of Wafer Contamination and Defectivity Part 2: Wet-Chemical Processes Particle Deposition and Adhesion Aqueous Cleaning and Surface Conditioning Processes Part 3: Dry Cleaning Processes Gas-phase Wafer Cleaning Technology Plasma Stripping and Cleaning Cryogenic Aerosols and Supercritical Fluid Cleaning Part 4: Analytical and Control Aspects Detection and Measurement of Particulate Contaminants Surface Chemical Composition and Morphology Ultratrace Impurity and Surface Morphology Analysis Analysis and Control of Electrically Active Contaminants Part 5: Directions for the Near Future. Codice inventario libreria ABE_book_usedgood_0815515545

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Titolo: Handbook of Silicon Wafer Cleaning ...

Casa editrice: William Andrew

Data di pubblicazione: 2008

Condizione libro:Used

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