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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
About the Author: Luttge studied Applied Sciences in Germany (1989-1993). She had been working as an engineering researcher at Institut für Mikrotechnik in Mainz, Germany, for nearly 5 years prior to starting her PhD studies in Microsystems Technologies at Imperial College in 1999, London, UK. In 2003, Luttge was awarded a PhD from University of London on the development of fabrication technology for micro-optical scanners. Switching her research interest to microfluidics applications, Luttge had been working for 12 years at University of Twente’s MESA+ Institute for Nanotechnology, The Netherlands, first as a senior scientist and since 2007 as an assistant professor prior to joining TU/e. Based on her established scientific profile in Nanoengineering for Medicine and Biology, Luttge has been appointed associate professor in the Microsystems Group at the Department of Mechanical Engineering in June 2013.
Titolo: Microfabrication for Industrial Applications
Casa editrice: Elsevier Science Ltd
Data di pubblicazione: 2011
Condizione libro: New
Descrizione libro William Andrew, 2011. Hardcover. Condizione libro: New. 1. Codice libro della libreria DADAX0815515820
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Descrizione libro William Andrew Pub, 2010. Hardcover. Condizione libro: Brand New. 1st edition. 352 pages. 9.29x7.56x1.02 inches. In Stock. Codice libro della libreria zk0815515820
Descrizione libro William Andrew, 2011. Hardcover. Condizione libro: Good. 1. Ships with Tracking Number! INTERNATIONAL WORLDWIDE Shipping available. May not contain Access Codes or Supplements. Buy with confidence, excellent customer service!. Codice libro della libreria 0815515820
Descrizione libro William Andrew, 2011. Hardcover. Condizione libro: As New. As New. book. Codice libro della libreria F5S5-2-Z-0815515820-5
Descrizione libro William Andrew, 2011. Hardcover. Condizione libro: New. New. book. Codice libro della libreria F5S6-4-Z-0815515820-6