Semiconductor Measurements and Instrumentation - Rilegato

Runyan, W.; Shaffner, T.

Rilegato

ISBN 10: 0070576971 ISBN 13: 9780070576971

Casa editrice: McGraw-Hill Education, 1998

Riassunto

The definitive reference on semiconductor characterization tools! Here, in one well-organized volume, are detailed explanations of the advanced and "traditional") techniques for evaluating virtually every criterion: crystal defects, impurity concentration, lifetime, film thickness, resistivity, and such critical electrical properties as mobility, Hall effect, and conductivity type. Reliable, high-accuracy methods of measuring hardness, stress, and various kinds of surface contamination are also included. In addition to its value as a practical everyday reference, the text also serves as an excellent user's guide to the latest methods of optical microscopy, scanning electron microscopy (SEM), electron microprobe analysis, transmission electron microscopy (TEM), Auger electron spectroscopy (AES), scanning probe microscopy (SPM), and secondary ion mass spectrometry (SIMS). This is the only guide that offers such "dual coverage" of its topic -- in terms of both measurements and tools.

Su questo libro

Informazioni sugli autori

McGraw-Hill authors represent the leading experts in their fields and are dedicated to improving the lives, careers, and interests of readers worldwide

McGraw-Hill authors represent the leading experts in their fields and are dedicated to improving the lives, careers, and interests of readers worldwide

Dettagli dell'edizione

• Editore: McGraw-Hill Education
• Data di pubblicazione: 1998
• Lingua: Inglese
• ISBN 10: 0070576971
• ISBN 13: 9780070576971
• Rilegatura: Copertina rigida
• Numero edizione: 2
• Numero di pagine: 454
• Contatto del produttore: non disponibile
• Persona responsabile: Ufficio Anagrafiche Messaggerie; 0039 0245774342; ufficio.anagrafiche@meli.it; ; Via Verdi, 8.; Assago Milano; 20090; Italia