Materials Science In Microelectronics: The Relationships Between Thin Film Processing And Structure: 1 - Rilegato

Machlin, E. S.

Rilegato

ISBN 10: 008044640X ISBN 13: 9780080446400

Casa editrice: Elsevier Science Ltd, 2005

Riassunto

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.

The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.

An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

Su questo libro

Product Description

Book by Machlin Eugene

Dettagli dell'edizione

• Editore: Elsevier Science Ltd
• Data di pubblicazione: 2005
• Lingua: Inglese
• ISBN 10: 008044640X
• ISBN 13: 9780080446400
• Rilegatura: Copertina rigida
• Numero edizione: 2
• Numero di pagine: 256
• Contatto del produttore: non disponibile
• Persona responsabile: LSWR Group; b.criscuolo@lswr.it; ; Via Spadolini, 7; Milano; Italia