Rapid Thermal Processing: Science and Technology - Rilegato

Rilegato

ISBN 10: 0122476905 ISBN 13: 9780122476907

Casa editrice: Academic Pr, 1993

Riassunto

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

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Dettagli dell'edizione

• Editore: Academic Pr
• Data di pubblicazione: 1993
• Lingua: Inglese
• ISBN 10: 0122476905
• ISBN 13: 9780122476907
• Rilegatura: Copertina rigida
• Numero edizione: 1
• Numero di pagine: 430
• Redattore: Fair Richard B.
• Contatto del produttore: non disponibile
• Persona responsabile: LSWR Group; b.criscuolo@lswr.it; ; Via Spadolini, 7; Milano; Italia