PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing - Brossura

Brossura

ISBN 10: 0123911761 ISBN 13: 9780123911766

Casa editrice: Academic Press, 2011

Riassunto

GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUME This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

Dettagli dell?edizione

• Editore: Academic Press
• Data di pubblicazione: 2011
• Lingua: Inglese
• ISBN 10: 0123911761
• ISBN 13: 9780123911766
• Rilegatura: Copertina flessibile
• Numero di pagine: 444
• Redattore: Rossnagel Stephen M.
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile