Offered here is a comprehensive treatment of integrated circuits in the submicron range. The first chapters cover basic devices used in circuits such as silicon MOSFET's, bipolar transistors, GaAs MESFET's, and HEMT's. A chapter on the relatively new GaAs resonant tunelling diode and transistor is also included. Further chapters address architecture and circuit wiring; the author also discusses rapid thermal processing and lithography. The text has been designed for electrical engineers, circuit designers, and students of physics and engineering.
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