A User's Guide to Vacuum Technology - Rilegato

O'Hanlon, John F.

 
9780471812425: A User's Guide to Vacuum Technology

Sinossi

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

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Product Description

Book by OHanlon John F

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Altre edizioni note dello stesso titolo

9780471016243: A User's Guide to Vacuum Technology

Edizione in evidenza

ISBN 10:  0471016241 ISBN 13:  9780471016243
Casa editrice: John Wiley & Sons Inc, 1980
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