Handbook of Sputter Deposition Technology: Principles, Technology and Applications - Brossura

Wasa, Kiyotaka; Hayakawa, Shigeru

Brossura

ISBN 10: 0815512805 ISBN 13: 9780815512806

Casa editrice: Noyes Pubns, 1992

Riassunto

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

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Recensione

"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report

Dettagli dell?edizione

• Editore: Noyes Pubns
• Data di pubblicazione: 1992
• Lingua: Inglese
• ISBN 10: 0815512805
• ISBN 13: 9780815512806
• Rilegatura: Copertina flessibile
• Numero edizione: 1
• Numero di pagine: 304
• Contatto del produttore: non disponibile