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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
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Contenuti
Thin Film Materials and Devices
Thin Film Process
Sputtering Phenomena
Sputtering Systems
Deposition of Compound Thin Films
Structural Control of Compound Thin Films
Microfabrication by Sputtering
Appendices
Index
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Thin Film Materials Technology Sputtering of Compound Materials.
Da: Universitätsbuchhandlung Herta Hold GmbH, Berlin, Germania
Valutazione del venditore 5 su 5 stelle
Hardcover. Versand aus Deutschland / We dispatch from Germany via Air Mail. Einband bestoßen, daher Mängelexemplar gestempelt, sonst sehr guter Zustand. Imperfect copy due to slightly bumped cover, apart from this in very good condition. Stamped. Sprache: Englisch. Codice articolo 5310MB
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