Microelectronic Processing: Chemical Engineering Aspects: 221 - Rilegato

Rilegato

ISBN 10: 0841214751 ISBN 13: 9780841214750

Casa editrice: American Chemical Society, 1989

Riassunto

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved―liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.―this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

Su questo libro

Contenuti

• Microelectronics Processing
• Theory of Transport Processes in Semiconductor Crystal Growth from the Melt
• Liquid-Phase Epitaxy and Phase Diagrams of Compound Semiconductors
• Physical Vapor Deposition Reactors
• Chemical Vapor Deposition
• Diffusion and Oxidation of Silicon
• Resists in Microlithography
• Plasma-Enhanced Etching and Deposition
• Interconnection and Packaging of High-Performance Integrated Circuits
• Semiconductor Processing Problems Solved by Wet (Solution) Chemistry

Product Description

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Dettagli dell'edizione

• Editore: American Chemical Society
• Data di pubblicazione: 1989
• Lingua: Inglese
• ISBN 10: 0841214751
• ISBN 13: 9780841214750
• Rilegatura: Copertina rigida
• Numero di pagine: 524
• Redattore: Hess Dennis W., Jensen Klaus F.
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile