Fundamentals of Microfabrication - Rilegato

Madou, Marc J.

Rilegato

ISBN 10: 0849394511 ISBN 13: 9780849394515

Casa editrice: CRC Press, 1997

Riassunto

Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

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Contenuti

Lithography
Introduction
Historical Note: Lithography's Origins
Photolithography
Alternative Lithographies
Emerging Lithography Technologies
Pattern Transfer with Dry Etching Techniques
Introduction
Dry Etching: Definitions and Jargon
Plasmas or Discharges
Physical Etching: Ion Etching or Sputtering and Ion Beam Milling
Dry Chemical Etching
Physical-Chemical Etching
Comparing Wet and Dry Etching
Dry Etching Micromachining Examples
Pattern Transfer with Additive Techniques
Introduction
Growth
Physical Vapor Deposition
Chemical Vapor Deposition
Epitaxy
Recent Trends in Vacuum Equipment
Electrochemical Deposition
Silk Screening or Screen Printing
Comparison of Thin versus Thick Film Deposition
Deposition Methods of Organic Layers
Planarization
Plasma Spraying
Selection Criteria for Deposition Method
Doping
Pattern Transfer with Additive Techniques Examples
Wet Bulk Micromachining
Introduction
Historical Note
Si-Crystallography
Si as a Substrate and Structural Material
Wet Isotropic and Anisotropic Etching
Etching with Bias and/or Illumination of the Semiconductor
Etch-Stop Techniques
Problems with Wet Bulk Micromachining
Wet Bulk Micromachining Examples
Surface Micromachining
Introduction
Historical Note
Mechanical Properties of Thin Films
Surface Micromachining Processes
Poly-Si Surface Micromachining Modifications
Non Poly-Si Surface Micromachining Modifications
Materials Case Studies
Poly-Silicon Surface Micromachining Examples
LIGA
Introduction
LIGA Processes - Introduction to the Technology
LIGA Applications
Technological Barriers and Competing Technologies
Comparison of Micromachining Techniques
Introduction and Terminology
Historical Note
Machining Tools
Comparison of Micromachining Techniques
Micromachining: What's Next? Nanomachinery by Molecular Engineering and Nanofabrication
Micromachine Development and Packaging
Introduction
Micromachine Development
Design Software
Packaging
Scaling Laws, Actuators, and Power in Miniaturization
Introduction
Microintuition
Scaling in Electrostatics and Electromagnetics
Scaling in Fluidics
Scaling in Optics
Scaling in Chemistry and Electrochemistry
Thermal Actuators
Other Actuators
Integrated Power
Microfabrication Applications
Introduction
Definitions and Classification Methods
Overall Market for Micromachines
Automotive Sensor Needs
Micromachining in Chemical Sensors and Instrumentation for Biomedical Applications
Gas Sensors
Miniaturization of Analytical Equipment
Index

Dettagli dell'edizione

• Editore: CRC Press
• Data di pubblicazione: 1997
• Lingua: Inglese
• ISBN 10: 0849394511
• ISBN 13: 9780849394515
• Rilegatura: Copertina rigida
• Numero edizione: 1
• Numero di pagine: 589
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile