Basic Vacuum Technology, - Rilegato

Chambers, A.

Rilegato

ISBN 10: 0852741286 ISBN 13: 9780852741283

Casa editrice: Taylor & Francis, 1989

Riassunto

The use of vacuum techniques is currently increasing to such an extent that they now find application in many areas of industrial development and production and academic research, as well as fulfilling an important teaching role in undergraduate laboratories. Basic Vacuum Technology addresses the need of undergraduate and postgraduate students, engineers and technicians for a concise and up-to-date introduction to this subject. Emphasising the underlying physics, this book provides all the information required by new users of vacuum systems. Its coverage is wide-ranging - from the behaviour of gases at low pressures, through methods of vacuum production and measurement, to system design and testing. Basic Vacuum Technology will be particularly useful for newcomers to the subject since it contains all the necessary background material for a full understanding of vacuum systems. It will also be of value to the growing number of industrial users of vacua, particularly in the microelectronics and semiconductor industries, and to researchers in surface science, thin film studies, electron microscopy, atomic and nuclear physics and solid state science.

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Contenuti

Gases: Introduction; Molecules; Bonding; Ions; Masses of atoms and molecules; Bonding, energy and temperature; The kinetic description of a gas; Results from kinetic theory; Vapour pressure; Gases and vapours; Macroscopic gas laws; Gas mixtures and partial pressures; Summary. Gases in vacuum systems: Introduction; The basic task, units and ranges of vacua; Formulas for important quantities; Qualitative description of the pumping process; Surface processes and outgassing; Gas flow - formalities; Gas flow - mechanisms; Molecular flow conductance of an aperture; Maximum speed of a pump in the molecular flow region; Molecular flow through pipes - transmission probability and conductance; Quantitative description of the pumping process; Summary. Pumps: Introduction; Positive displacement pumps; Kinetic pumps; Entrapment pumps; Pump selection. Measurement of pressure: Introduction; Total pressure gauges; Liquid level manometers; Thermal conductivity gauges; Ionisation gauges; Capacitance manometer gauges; Spinning rotor gauge; Calibration of vacuum gauges; Partial pressure gauges; The magnetic sector analyser; The quadrupole residual gas analyser; Display of spectra; Interpretation of spectra; Summary. Vacuum materials and components: Introduction; Properties required; Commonly used materials; Seals; Ceramics and glasses; Pump fluids; Flanges; Fittings; Machining and construction of components; Summary. Cleaning: Introduction; General considerations; Procedure selection; Cleaning procedures; Packaging; General cleaning techniques; Special cleaning techniques; Cleaning of vacuum components and plant after use; Summary. Leaks and leak detection: Introduction; Real and virtual leaks; Methods of leak detection; Leak detectors; Summary. Systems: Introduction; Simple rotary pumped systems; Diffusion pumped system; A turbo molecular pumped system; Ultra-high vacuum system; A cryo pumped system; A large volume fully automated multi-pumped system; A particle accelerator pumping system; Summary.

Dettagli dell'edizione

• Editore: Taylor & Francis
• Data di pubblicazione: 1989
• Lingua: Inglese
• ISBN 10: 0852741286
• ISBN 13: 9780852741283
• Rilegatura: Copertina rigida
• Numero edizione: 1
• Numero di pagine: 180
• Contatto del produttore: non disponibile
• Persona responsabile: Buchpark GmbH; gpsr@buchpark.de; ; Krügerweg 1; Trebbin; Brandenburg; 14959; Germania