Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing: Volumes 573-574 - Brossura

Brossura

ISBN 10: 0878493913 ISBN 13: 9780878493913

Casa editrice: Trans Tech Pubn, 2008

Riassunto

Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

Dettagli dell'edizione

• Editore: Trans Tech Pubn
• Data di pubblicazione: 2008
• Lingua: Inglese
• ISBN 10: 0878493913
• ISBN 13: 9780878493913
• Rilegatura: Copertina flessibile
• Numero di pagine: 432
• Redattore: Lerch W., Niess J.
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile