Physics of Radiofrequency Capacitive Discharge - Rilegato

Savinov, V. P.

Rilegato

ISBN 10: 1138600806 ISBN 13: 9781138600805

Casa editrice: CRC Press, 2018

Riassunto

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

Su questo libro

Informazioni sull'autore

V. P. Savinov

Dettagli dell'edizione

• Editore: CRC Press
• Data di pubblicazione: 2018
• Lingua: Inglese
• ISBN 10: 1138600806
• ISBN 13: 9781138600805
• Rilegatura: Copertina rigida
• Numero edizione: 1
• Numero di pagine: 342
• Contatto del produttore: Taylor and Francis, GPSR Taylor and Francis; gpsr@taylorandfrancis.com; ; Taylor & Francis Verlag GmbH, Kaufingerstraße 24; München; 80331; Germania