Micro Electromechanical Systems MEMS: Practical Lab Manual - Rilegato

 
9781394229833: Micro Electromechanical Systems MEMS: Practical Lab Manual
Rilegato
ISBN 10: 1394229836 ISBN 13: 9781394229833
Casa editrice: IEEE, 2025

Sinossi

Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices

Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.

The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.

The book covers additional topics such as:

  • Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation
  • Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing
  • X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy
  • Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field

A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.

Informazioni sull'autore

SANKET GOEL, PH.D., is a Professor with the Department of Electrical and Electronics Engineering and Principal Investigator with the MEMS, Microfluidics and Nanoelectronics (MMNE) Lab at BITS Pilani, Hyderabad Campus, Hyderabad, India.

Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.

Editore
IEEE
Data di pubblicazione
2025
Lingua
Inglese
ISBN 10 
1394229836
ISBN 13 
9781394229833
Rilegatura
Copertina rigida
Numero di pagine
168
Redattore
Goel Sanket
Contatto del produttore
non disponibile
Persona responsabile
non disponibile