Handbook of Semiconductor Manufacturing Technology - Rilegato

Rilegato

ISBN 10: 1574446754 ISBN 13: 9781574446753

Casa editrice: CRC Press, 2007

Riassunto

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on…

Silicon-on-insulator (SOI) materials and devices

Supercritical CO2 in semiconductor cleaning

Low-κ dielectrics

Atomic-layer deposition

Damascene copper electroplating

Effects of terrestrial radiation on integrated circuits (ICs)

Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Su questo libro

Informazioni sull?autore

Nishi, Yoshio; Doering, Robert

Dettagli dell'edizione

• Editore: CRC Press
• Data di pubblicazione: 2007
• Lingua: Inglese
• ISBN 10: 1574446754
• ISBN 13: 9781574446753
• Rilegatura: Copertina rigida
• Numero edizione: 2
• Numero di pagine: 1720
• Redattore: Nishi Yoshio, Doering Robert
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile