Introduction to Metrology Applications in Ic Manufacturing - Brossura

Su, Bo; Solecky, Eric; Vaid, Alok

 
9781628418118: Introduction to Metrology Applications in Ic Manufacturing
Brossura
ISBN 10: 1628418117 ISBN 13: 9781628418118
Casa editrice: Society of Photo Optical, 2015

Sinossi

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis―specifically, precision, matching, and relative accuracy.

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Editore
Society of Photo Optical
Data di pubblicazione
2015
Lingua
Inglese
ISBN 10 
1628418117
ISBN 13 
9781628418118
Rilegatura
Copertina flessibile
Numero di pagine
164
Contatto del produttore
non disponibile
Persona responsabile
non disponibile