Articoli correlati a Precision Motion Control: Design and Implementation
Sinossi
Precision manufacturing is a development that has been gathering momentum over the 20th century and accelerating over 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes, (lithography, wafer probing, inspection), co-ordinate measuring machines (CMMs) and precision metrology systems (scanning probe microscopy (SPM)), robot/machine tools to carry out micro-assembly (MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This title is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.
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- EditoreSpringer Verlag
- Data di pubblicazione2001
- ISBN 10 1852333286
- ISBN 13 9781852333287
- RilegaturaCopertina rigida
- LinguaInglese
- Numero edizione1
- Numero di pagine232
- RedattoreTan Kok Kiong, Heng Lee Tong, Huifang Dou, Sunan Huang
- Contatto del produttorenon disponibile
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