Scanning Electron Microscopy: Physics of Image Formation and Microanalysis - Rilegato

Reimer, Ludwig

Rilegato

ISBN 10: 3540135308 ISBN 13: 9783540135302

Casa editrice: Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 1985

Riassunto

The aim of this book is to outline the physics of image formation, electron­ specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron­ specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec­ tron beam can be blanked at high frequencies for time-resolving exper­ iments and what problems have tobe taken into account when focusing.

Dettagli dell'edizione

• Editore: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
• Data di pubblicazione: 1985
• Lingua: Inglese
• ISBN 10: 3540135308
• ISBN 13: 9783540135302
• Rilegatura: Copertina rigida
• Numero di pagine: 457
• Contatto del produttore: non disponibile
• Persona responsabile: non disponibile