Thin Films Material Technology: Sputtering of Compound Materials - Rilegato

Wasa, Kiyotaka; Kitabatake, Makoto; Adachi, Hideaki

 
9783540211181: Thin Films Material Technology: Sputtering of Compound Materials
Rilegato
ISBN 10: 3540211187 ISBN 13: 9783540211181
Casa editrice: Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 2004

Sinossi

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts. The key topics include: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses. It covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.

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Recensione

From the reviews:

"The book starts by defining thin film materials and describing the basics of their nucleation and growth. ... I found the book useful and would not hesitate to recommend it as essential reading to anyone who is entering the field of sputter deposition, particularly the deposition of compound materials." (Dr. Charles A. Bishop, Materials World, Vol. 14 (10), 2006)

Contenuti

Thin Film Materials And Devices.- Thin Film Processes.- Sputtering Phenomena.- Sputtering Systems.- Deposition Of Compound Thin Films.- Structural Control Of Compound Thin Films.- Microfabrication By Sputtering.- Appendix.- Index.

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Editore
Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Data di pubblicazione
2004
Lingua
Inglese
ISBN 10 
3540211187
ISBN 13 
9783540211181
Rilegatura
Copertina rigida
Numero di pagine
532
Contatto del produttore
non disponibile
Persona responsabile
CMN Printpool Inh. Mathis Neumann
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