Microsystem Technology and Microrobotics - Rilegato

Fatikow, Sergej; Rembold, Ulrich

Rilegato

ISBN 10: 3540606580 ISBN 13: 9783540606581

Casa editrice: Springer Nature, 1997

Riassunto

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Su questo libro

Informazioni sull'autore

Dr.-Ing. Sergej Fatikow, Univeristät Gesamthochschule Kassel, Leiter des Institutes für Regelungs- und Automatisierungstechnik im Fachbereich Elektrotechnik.

Dalla quarta di copertina

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

Dettagli dell'edizione

• Editore: Springer Nature
• Data di pubblicazione: 1997
• Lingua: Inglese
• ISBN 10: 3540606580
• ISBN 13: 9783540606581
• Rilegatura: Copertina rigida
• Numero di pagine: 408
• Contatto del produttore: Springer Nature Customer Service Center GmbH; ProductSafety@springernature.com; ; Europaplatz 3; Heidelberg; 69115; Germania