Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices - Brossura

Hilleringmann, Ulrich

Brossura

ISBN 10: 3658410426 ISBN 13: 9783658410421

Casa editrice: Springer Vieweg, 2023

Riassunto

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.

Dettagli dell?edizione

• Editore: Springer Vieweg
• Data di pubblicazione: 2023
• Lingua: Inglese
• ISBN 10: 3658410426
• ISBN 13: 9783658410421
• Rilegatura: Copertina flessibile
• Numero di pagine: 278
• Contatto del produttore: Elevation; https://www.also.com/ec/cms5/en_6000/6000/index.jsp; ; Friedrich-Karl-Str. 9; Hamburg; 22391; Germania