Articoli correlati a Micro and Nano Fabrication: Tools and Processes
Sinossi
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Le informazioni nella sezione "Riassunto" possono far riferimento a edizioni diverse di questo titolo.
Informazioni sull?autore
Hans Gatzen received a PhD equivalent in Mechanical Engineering from the RWTH Aachen in Aachen, Germany, and held various positions in the computer peripherals industry in Germany and the U.S. from 1973 to 1992. In 1992, he founded the Institute for Microtechnology (imt) at the Hanover University in Hanover, Germany (now Leibniz Universität Hannover) and was its director until his retirement in 2010. He is a Fellow of the American Society of Mechanical Engineers (ASME) and a member of Acatech (National Academy of Science and Engineering).
Volker Saile received a PhD in Physics from the Ludwigs-Maximilians-Universitaet München (LMU), and was later employed as a Staff Scientist at the Deutsches Elektronen-Synchrotron DESY in Hamburg, Germany, until 1989. From 1989 to 1998, he served as the Director of the J. Bennett Johnston, Sr., Center for Advanced Microstructures and Devices (CAMD), Baton Rouge, Louisana, USA. Since 1998, he is Professor of Microstructure Technology at the Karlsruhe Institute of Technology (KIT). Currently, he serves as Head of the KIT Division 5, Physics and Mathematics.
Juerg Leuthold is the head of the Institute of Electromagnetic Fields (IEF) at ETH Zurich, Switzerland. His research interests are in the field of nano-photonics, plasmonics, integrated optics and optical communications. From 2004 to 2013 he was a full Professor at the Karlsruhe Institute of Technology (KIT) in Germany and from 1999 to 2004 he was affiliated with Bell Labs,
Lucent Technologies.
Dalla quarta di copertina
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Le informazioni nella sezione "Su questo libro" possono far riferimento a edizioni diverse di questo titolo.
Compra nuovo
Visualizza questo articolo
EUR 94,11
EUR 3,42 per la spedizione in U.S.A.
Destinazione, tempi e costiAltre edizioni note dello stesso titolo
Risultati della ricerca per Micro and Nano Fabrication: Tools and Processes
Foto dell'editore
Micro and Nano Fabrication: Tools and Processes
Da: HPB-Red, Dallas, TX, U.S.A.
Valutazione del venditore 5 su 5 stelle
paperback. Condizione: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Codice articolo S_422829840
Quantità: 1 disponibili
Foto dell'editore
Micro and Nano Fabrication: Tools and Processes
Da: Lucky's Textbooks, Dallas, TX, U.S.A.
Valutazione del venditore 5 su 5 stelle
Condizione: New. Codice articolo ABLIING23Mar3113020315735
Quantità: Più di 20 disponibili
Immagini fornite dal venditore
Micro and Nano Fabrication : Tools and Processes
Da: GreatBookPrices, Columbia, MD, U.S.A.
Valutazione del venditore 5 su 5 stelle
Condizione: New. Codice articolo 28081041-n
Quantità: Più di 20 disponibili
Foto dell'editore
Micro and Nano Fabrication: Tools and Processes
Da: California Books, Miami, FL, U.S.A.
Valutazione del venditore 5 su 5 stelle
Condizione: New. Codice articolo I-9783662508268
Quantità: Più di 20 disponibili
Foto dell'editore
Micro and Nano Fabrication: Tools and Processes
Da: Ria Christie Collections, Uxbridge, Regno Unito
Valutazione del venditore 5 su 5 stelle
Condizione: New. In. Codice articolo ria9783662508268_new
Quantità: Più di 20 disponibili
Foto dell'editore
Micro and Nano Fabrication (Paperback)
Editore:
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG, Berlin, 2016
ISBN 10: 3662508265
ISBN 13: 9783662508268
Nuovo
Paperback
Da: Grand Eagle Retail, Mason, OH, U.S.A.
Valutazione del venditore 5 su 5 stelle
Paperback. Condizione: new. Paperback. For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. Shipping may be from multiple locations in the US or from the UK, depending on stock availability. Codice articolo 9783662508268
Quantità: 1 disponibili
Immagini fornite dal venditore
Micro and Nano Fabrication : Tools and Processes
Da: GreatBookPrices, Columbia, MD, U.S.A.
Valutazione del venditore 5 su 5 stelle
Condizione: As New. Unread book in perfect condition. Codice articolo 28081041
Quantità: Più di 20 disponibili
Immagini fornite dal venditore
Micro and Nano Fabrication : Tools and Processes
Da: GreatBookPricesUK, Woodford Green, Regno Unito
Valutazione del venditore 5 su 5 stelle
Condizione: New. Codice articolo 28081041-n
Quantità: Più di 20 disponibili
Foto dell'editore
Micro and Nano Fabrication: Tools and Processes
Da: Chiron Media, Wallingford, Regno Unito
Valutazione del venditore 4 su 5 stelle
Paperback. Condizione: New. Codice articolo 6666-IUK-9783662508268
Quantità: 10 disponibili
Immagini fornite dal venditore
Micro and Nano Fabrication
Editore:
Springer Berlin Heidelberg Okt 2016, 2016
ISBN 10: 3662508265
ISBN 13: 9783662508268
Nuovo
Taschenbuch
Da: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germania
Valutazione del venditore 5 su 5 stelle
Taschenbuch. Condizione: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. 548 pp. Englisch. Codice articolo 9783662508268
Quantità: 2 disponibili