MEMS Pressure Sensors: Fabrication and Process Optimization - Rilegato

Alvi, Parvej Ahmad

 
9788461622078: MEMS Pressure Sensors: Fabrication and Process Optimization
Rilegato
ISBN 10: 8461622073 ISBN 13: 9788461622078
Casa editrice: IFSA Publishing, 2012

Sinossi

MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.

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Editore
IFSA Publishing
Data di pubblicazione
2012
Lingua
Inglese
ISBN 10 
8461622073
ISBN 13 
9788461622078
Rilegatura
Copertina rigida
Numero di pagine
176
Contatto del produttore
non disponibile
Persona responsabile
non disponibile