Titolo: Characterization in Silicon Processing (AGENCY/DISTRIBUTED) [Hardcover] Yale E. Strausser (author)
Editore: Momentum Press
Data di pubblicazione: 2010
Lingua: Inglese
ISBN 10: 1606501097
ISBN 13: 9781606501092
Rilegatura: Rilegato
Condizione: Very Good

Descrizione articolo

Riassunto

With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silicon Epitaxial Growth -- Coverage of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors -- Concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy

L'autore

Yale E. Strausser

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