Computational Modeling in Semiconductor Processing (The Artech House Materials Science Library)

ISBN 10: 0890067074 / ISBN 13: 9780890067079

Editore: Artech House, 1994

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Codice articolo ERICA82908900670746

Dati bibliografici

• Titolo: Computational Modeling in Semiconductor Processing (The Artech House Materials Science Library)
• Editore: Artech House
• Data di pubblicazione: 1994
• Lingua: Inglese
• ISBN 10: 0890067074
• ISBN 13: 9780890067079
• Rilegatura: Hardcover
• Condizione: New
• Tipo di libro: book

Descrizione articolo

Riassunto

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.

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