Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester

This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process.

Shanky Saxena is an Assistant Professor in the School of Electronics and Electrical Engineering at Lovely Professional University, Punjab, India. He received a degree in electronics and communication engineering from the University of Rajasthan, India, in 2008, and a master’s degree in communication and signal processing from Jaipur National University, Jaipur, India, in 2013. Dr. Saxena completed his Ph.D. from Malaviya National Institute of Technology, Jaipur, India, in 2019. He worked as a research scholar at the MEMS and Microsensors Department, CSIR-Central Electronics Engineering Research Institute, Pilani, India, from 2013 to 2018. He is a Senior Member of IEEE USA and has over 09 years of teaching and research experience with more than 25 publications in the MEMS field. His research interests include MEMS-based piezoelectric vibration energy harvesters and energy harvesting for bio-medical applications.

Ritu Sharma is an Associate Professor in the Department of Electronics and Communication Engineering, Malaviya National Institute of Technology (MNIT), Jaipur. She completed an M.Tech. in VLSI and a Ph.D. degree in photonics and optics from the Department of Electronics and Communication Engineering, MNIT, in 2004 and 2011, respectively. Dr. Sharma is working on important projects in the field of energy harvesters, optoelectronics and biosensors. Her research interests include fabrication and characterization of piezoelectric energy harvesters, nanophotonic devices based on low-cost materials, nanomaterials for nano-optoelectronic and nano-piezoelectric devices, MEMS, and nanoelectronic devices.

B. D. Pant worked as a Professor with AcSIR, and also an Emeritus Scientist with the Smart Sensors Area of CSIR-CEERI Pilani, India. He received an M.E. degree in microelectronics from the Birla Institute of Technology and Science (BITS), Pilani, India, in 1994, and a Ph.D. degree in MEMS from Kurukshetra University, Kurukshetra, India, in 2010. Dr. Pant has worked on several important projects of global interest e.g. the development of high-power piezoelectric materials, semiconductor devices, VLSICs, and MEMS. He has also led several projects on MEMS and NEMS. His interests are focused on developing MEMS technology and devices for medical, industrial, automotive, social security, and aerospace applications. His current interests are Bio-MEMS, microfluidics, micro, and nano-energy harvesters.