Dynamics of Microelectromechanical Systems

Nicolae Lobontiu

ISBN 10: 1441942254 / ISBN 13: 9781441942258

Editore: Springer US, 2010

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Dati bibliografici

• Titolo: Dynamics of Microelectromechanical Systems
• Editore: Springer US
• Data di pubblicazione: 2010
• Lingua: Inglese
• ISBN 10: 1441942254
• ISBN 13: 9781441942258
• Rilegatura: Taschenbuch
• Condizione: Neu
• Dimensioni: 235 L x 155 A x 23 P (millimetri) 235 millimetri di larghezza per 155 millimetri di altezza per 23 millimetri di profondità
• Peso: 628 grammi

Descrizione articolo

Riassunto

This much-needed textbook is an exploration of a key area of study in mechanics. It is suitable for senior undergraduate and graduate level students and offers a novel and systematic look into the dynamics of MEMS. A highly practical treatment of the subject, it includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the quasi-static sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

Dalla quarta di copertina

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

• An in-depth treatment of problems that involve reliable modeling, analysis and design,
• Analytical models with correct dependences on service dimensions,
• Cantilever based systems for nanofabrication researchers and designers, and
• Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.