Guide To Characteristics And Characterization Of Semiconductor Surfaces

Jerzy Ruzyllo

ISBN 10: 9811254818 / ISBN 13: 9789811254819

Editore: World Scientific Publishing Co Pte Ltd, SG, 2025

This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features.Based on the author's over thirty years of research and graduate advising in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers and industry professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring. Codice articolo LU-9789811254819

Riassunto:

This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features. Based on the author's over thirty years of research and graduate advising in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers and industry professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring.

Informazioni sull'autore:

Jerzy Ruzyllo is a Distinguished Professor Emeritus in the School of Electrical Engineering and Computer Science at the Pennsylvania State University. He joined Penn State in 1984 after completing his education, obtaining a PhD degree in 1977, and serving on the faculty of the Warsaw University of Technology. Throughout his career, Dr Ruzyllo was actively involved in research and teaching in the area of semiconductor science and engineering with emphasis on processing and characterization of semiconductor surfaces. Over the years, he was among the leaders initiating and running, as well as editing proceedings volumes, of the series of international conferences on processing of semiconductor surfaces. Dr Ruzyllo is the author of over 200 research papers and two books published by the World Scientific Publishing Co., Guide to Semiconductor Engineering (2020), and Semiconductor Glossary (2016). Dr Ruzyllo is a Life Fellow of IEEE and Fellow of the Electrochemical Society.

Dati bibliografici

Titolo: Guide To Characteristics And ...
Casa editrice: World Scientific Publishing Co Pte Ltd, SG
Data di pubblicazione: 2025
Legatura: Hardback
Condizione: New