Titolo: Handbook of Microlithography, Micromachining and Microfabrication, Volume 1 (Materials and Devices Series, 1)
Editore: Institution Of Engineering And Technology
Data di pubblicazione: 1997
Lingua: Inglese
ISBN 10: 0852969066
ISBN 13: 9780852969069
Rilegatura: Hardcover

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Riassunto

Lithography is the key technology that has enabled the dynamic growth of the integrated circuit industry over the past two decades. With the continuing demand for technological development, lithography remains at the frontier of high technology. This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.

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