Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40)

Prosenjit Rai-Choudhury

ISBN 10: 0819423793 / ISBN 13: 9780819423795

Editore: Society of Photo Optical, 1997

Riguardo questo articolo

Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority!

Codice articolo S_420915401

Dati bibliografici

• Titolo: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 2: Micromachining and Microfabrication (SPIE PRESS Monograph Vol. PM40) (Spie Press Monograph, Pm39-Pm40)
• Editore: Society of Photo Optical
• Data di pubblicazione: 1997
• Lingua: Inglese
• ISBN 10: 0819423793
• ISBN 13: 9780819423795
• Rilegatura: Paperback
• Condizione: Good

Descrizione articolo

Riassunto

Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

Product Description

Book by None