Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Rossnagel, Stephen M., Westwood, William D., Cuomo, Jerome J

ISBN 10: 0815512201 / ISBN 13: 9780815512202

Editore: William Andrew, 1991

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Codice articolo ERICA77308155122016

Dati bibliografici

• Titolo: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
• Editore: William Andrew
• Data di pubblicazione: 1991
• Lingua: Inglese
• ISBN 10: 0815512201
• ISBN 13: 9780815512202
• Rilegatura: Hardcover
• Condizione: Like New
• Tipo di libro: book

Descrizione articolo

Riassunto

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Recensione

"The text provides and excellent reference for plasma processing." - SAMPE Journal