Handbook of Semiconductor Manufacturing Technology

Doering, Robert (EDT); Nishi, Yoshio (EDT)

ISBN 10: 1574446754 / ISBN 13: 9781574446753

Editore: CRC Press, 2007

Unread book in perfect condition. Codice articolo 2573579

Riassunto:

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available.

Stay Current with the Latest Technologies
In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on…

Silicon-on-insulator (SOI) materials and devices

Supercritical CO2 in semiconductor cleaning

Low-κ dielectrics

Atomic-layer deposition

Damascene copper electroplating

Effects of terrestrial radiation on integrated circuits (ICs)

Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication.

While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Informazioni sull?autore: Nishi, Yoshio; Doering, Robert

Dati bibliografici

Titolo: Handbook of Semiconductor Manufacturing ...
Casa editrice: CRC Press
Data di pubblicazione: 2007
Legatura: Rilegato
Condizione: As New
Edizione: seconda edizione