High-k Dielectrics and Metal Gates for Memory Applications : Investigation of High-k Dielectrics and Metal Gate Electrodes for Floating Gate Non-Volatile Memory Applications

Lingua: inglese

Editore: LAP LAMBERT Academic Publishing, 2012

3846588474 / 9783846588475

Da: AHA-BUCH GmbH, Einbeck, GermaniaAHA-BUCH GmbH

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nach der Bestellung gedruckt Neuware - Printed after ordering - Due to the increasing demand of non-volatile flash memories in the portable electronics, the device structures need to be scaled down drastically. However, the scalability of traditional floating gate structures beyond 20 nm NAND flash technology node is uncertain. In this regard, the use of metal gates and high-k dielectrics as the gate and interpoly dielectrics respectively, seem to be promising substitutes in order to continue the flash scaling beyond 20nm. Furthermore, research of novel memory structures to overcome the scaling challenges need to be explored. Through this work, the use of high-k dielectrics as IPDs in a memory structure has been studied. For this purpose, IPD process optimization and barrier engineering were explored to determine and improve the memory performance. Specifically, the concept of high-k / low-k barrier engineering was studied in corroboration with simulations. In addition, a novel memory structure comprising a continuous metal floating gate was investigated in combination with high-k blocking oxides. Both electrical and analytical characterization studies were undertaken to gain insight into the behavior of the memory layers in the structure.

Codice articolo 9783846588475

Titolo
High-k Dielectrics and Metal Gates for Memory Applications : Investigation of High-k Dielectrics and Metal Gate Electrodes for Floating Gate Non-Volatile Memory Applications
Autore
Srikant Jayanti
Editore
LAP LAMBERT Academic Publishing
Anno di pubblicazione
2012
Condizione
Neu
Rilegatura
Taschenbuch
Lingua
inglese
ISBN 10
3846588474
ISBN 13
9783846588475
Peso dell'articolo
393 grammi
Dimensioni
220x150x16 mm

AHA-BUCH GmbH

Einbeck, Germania

Venditore con 5 stelle

Venditore AbeBooks dal 14 agosto 2006

Tariffe di spedizione da Germania a U.S.A.

ArticoloDa 30 a 40 giorni lavorativiDa 7 a 14 giorni lavorativi
Primo articoloEUR 61,97EUR 71,97
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