An Introduction to Microelectromechanical Systems Engineering

Maluf, Nadim

ISBN 10: 0890065810 / ISBN 13: 9780890065815

Editore: Norwood, Massachusetts, U.S.A.: Artech House on Demand, 1999

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hardback book in very good to near fine condition. several pages dog-eared. no names,hiliting.etc. Codice articolo 122809

Dati bibliografici

Titolo: An Introduction to Microelectromechanical ...

Casa editrice: Norwood, Massachusetts, U.S.A.: Artech House on Demand

Data di pubblicazione: 1999

Legatura: Hardcover

Condizione: Very Good

Edizione: 2nd Edition

Descrizione articolo

Riassunto:

Here's a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications.

Informazioni sull?autore:

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.