Introduction to Microelectronic Fabrication. Questo articolo non è disponibile.
Lingua: inglese
Editore: Pearson, 2001
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Codice articolo 55399-5
- Titolo
- Introduction to Microelectronic Fabrication
- Autore
- Jaeger, Richard C.
- Editore
- Pearson
- Anno di pubblicazione
- 2001
- Condizione
- good
- Rilegatura
- Brossura
- Lingua
- inglese
- ISBN 10
- 0201444941
- ISBN 13
- 9780201444940
- Edizione
- seconda edizione
For courses in Theory and Fabrication of Integrated Circuits.
The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.
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Dalla quarta di copertina
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
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