MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

Prosenjit Rai-Choudhury

ISBN 10: 0819437166 / ISBN 13: 9780819437167

Editore: SPIE Publications, 2000

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Dati bibliografici

• Titolo: MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
• Editore: SPIE Publications
• Data di pubblicazione: 2000
• Lingua: Inglese
• ISBN 10: 0819437166
• ISBN 13: 9780819437167
• Rilegatura: hardcover
• Condizione: Good

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Riassunto

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Product Description

Book by P RaiChoudhury