MEMS: A Practical Guide of Design, Analysis, and Applications

Oliver Paul (u. a.)

ISBN 10: 3540211179 / ISBN 13: 9783540211174

Editore: Springer-Verlag GmbH, 2006

MEMS: A Practical Guide of Design, Analysis, and Applications | Oliver Paul (u. a.) | Buch | xxv | Englisch | 2006 | Springer-Verlag GmbH | EAN 9783540211174 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu Print on Demand. Codice articolo 102091975

Riassunto:

A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

Contenuti: Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.

Dati bibliografici

Titolo: MEMS: A Practical Guide of Design, Analysis,...
Casa editrice: Springer-Verlag GmbH
Data di pubblicazione: 2006
Legatura: Buch
Condizione: Neu