Nanofabrication | Techniques and Principles

Maria Stepanova (u. a.)

ISBN 10: 3709104238 / ISBN 13: 9783709104231

Editore: Springer, 2011

Nanofabrication | Techniques and Principles | Maria Stepanova (u. a.) | Buch | viii | Englisch | 2011 | Springer | EAN 9783709104231 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu Print on Demand. Codice articolo 107270233

Riassunto:

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Dalla quarta di copertina: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Dati bibliografici

Titolo: Nanofabrication | Techniques and Principles
Casa editrice: Springer
Data di pubblicazione: 2011
Legatura: Buch
Condizione: Neu