Physics of Radio-Frequency Plasmas

Chabert, Pascal; Braithwaite, Nicholas

ISBN 10: 0521763002 / ISBN 13: 9780521763004

Editore: Cambridge University Press, 2011

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Dati bibliografici

• Titolo: Physics of Radio-Frequency Plasmas
• Editore: Cambridge University Press
• Data di pubblicazione: 2011
• Lingua: Inglese
• ISBN 10: 0521763002
• ISBN 13: 9780521763004
• Rilegatura: Rilegato
• Condizione: New

Descrizione articolo

Riassunto

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

Informazioni sugli autori

Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

Nicholas Braithwaite is Professor of Engineering Physics at The Open University, where his research group work on the physics of 'technological' plasmas. He has been on the editorial board of the journal Plasma Sources Science and Technology since 1998.