The Science and Engineering of Microelectronic Fabrication

Campbell, Stephen A.

ISBN 10: 0195136055 / ISBN 13: 9780195136050

Editore: Oxford University Press, 2001

Item in very good condition! Textbooks may not include supplemental items i.e. CDs, access codes etc. Codice articolo 00096443919

Riassunto:

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face.
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST).

Informazioni sull?autore: Stephen A. Campbell is a Professor in the Electrical and Computer Engineering Department at the University of Minnesota and the Director of the University's Microtechnology Laboratory. He has extensive experience in semiconductor device fabrication in both industry and university labs. His research interests include rapid thermal chemical vapor deposition, high performance gate dielectrics, magnetic MEMS, and nanostructures.

Dati bibliografici

Titolo: The Science and Engineering of ...
Casa editrice: Oxford University Press
Data di pubblicazione: 2001
Legatura: Rilegato
Condizione: Very Good
Edizione: seconda edizione